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Conferences > FiO > 2021 > JW7A > JW7A.51

Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry

Matthew A. Koppa, Mark Dong, David Heim, Andrew J. Leenheer, Matthew Zimmermann, Daniel Dominguez, Gerald Gilbert, Dirk Englund, and Matt Eichenfield

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Abstract

We measure the photoelastic constants of piezo-optomechanical photonic integrated circuits incorporating a specially formulated, silicon-depleted silicon nitride thin films using a laser doppler vibrometer to calibrate the strain produced by the integrated piezoelectric actuators.

© 2021 The Author(s)

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