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Conferences > FiO > 2021 > FM1B > FM1B.6

Generic Heterogeneous Integration Process Flow for Commercial Foundry Low-Index Photonic Platforms

Stijn Poelman, Stijn Cuyvers, Jasper De Witte, Artur Hermans, Kasper Van Gasse, Nathalie Picqué, Gunther Roelkens, Dries Van Thourhout, and Bart Kuyken

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Abstract

We demonstrate a generic heterogeneous integration process flow for low-index photonic platforms, based on a two-step microtransfer printing approach. In this work, a silicon coupler is used for low-loss integration of III/V on silicon nitride.

© 2021 The Author(s)

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