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Thin Film GaAs Photodetector Integrated on Silicon using Ultra-Thin Ge Buffer Layer for Visible Photonics Applications

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Abstract

GaAs metal-semiconductor-metal photodetector epitaxially grown on Si is demonstrated. The growth of GaAs is carried out using low temperature ultra-thin Ge interlayers. Results show a remarkable photoresponsivity value of (0.54 ± 0.15) A/W at 5 V reverse bias, and 850 nm.

© 2020 The Author(s)

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