High confinement and ultra-low losses are required to generate Kerr frequency combs at telecom wavelengths, which is challenging for thick anomalous-dispersion Si3N4 waveguides. We report the fabrication of ultra-high-Q (>6x106) Si3N4 micro-resonators for nonlinear photonics.

© 2019 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription