Abstract

We demonstrate an ultra-compact optical CO2 sensor by combining metamaterial-enhanced MEMS components with an efficient multi-reflection cell (5.7×5.7×4.5 mm3). We measure a CO2 sensitivity of 23.3 ppmCO2/√Hz at an energy consumption of 58.6 mJ.

© 2019 The Author(s)

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription