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Conferences > FiO > 2018 > FTu5C > FTu5C.3

Coherent Extreme-Ultraviolet Source Applied to Atom Probe Tomography

Luis Miaja-Avila, Ann N. Chiaramonti, Paul T. Blanchard, Norman A. Sanford, Henry C. Kapteyn, Margaret M. Murnane, David R. Diercks, and Brian P. Gorman

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Abstract

We have adapted an atom probe tomograph (APT) with an extreme ultraviolet (EUV) source. The observations suggest that the photoionization pathway provided by the EUV light is superior to the thermal mechanism in conventional APT.

© 2018 The Author(s)

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