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Conferences > FiO > 2016 > FW5H > FW5H.6

Scanning Customized Swept-source Optical Coherence Tomography (SS-OCT) for the Metrology of Freeform Optical Surfaces

Di Xu, Jianing Yao, Nan Zhao, and Jannick P. Rolland

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Abstract

A high-precision SS-OCT system with custom scanning configuration was developed for the point cloud metrology of freeform optical surfaces. Capabilities were demonstrated on an Alvarez surface and a measurement precision of λ/20 was achieved.

© 2016 Optical Society of America

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