Optical Metrology Systems Spanning the Full Spatial Frequency Spectrum

Dae Wook Kim; Dae Wook Kim; Maham Aftab; Heejoo Choi; Logan Graves; Isaac Trumper

doi:10.1364/FIO.2016.FW5G.4

Frontiers in Optics 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper FW5G.4
•https://doi.org/10.1364/FIO.2016.FW5G.4

Optical Metrology Systems Spanning the Full Spatial Frequency Spectrum

Dae Wook Kim, Maham Aftab, Heejoo Choi, Logan Graves, and Isaac Trumper

Frontiers in Optics 2016

Rochester, New York United States
17–21 October 2016
ISBN: 978-1-943580-19-4

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Optical Fabrication and Metrology (FW5G)

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D. W. Kim, M. Aftab, H. Choi, L. Graves, and I. Trumper, "Optical Metrology Systems Spanning the Full Spatial Frequency Spectrum," in Frontiers in Optics 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper FW5G.4.

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Abstract

We present a collection of unique, collaborative, optical metrology systems that are fully capable of measuring the extensive spectrum of low-to-mid-to-high spatial frequencies, corresponding to surface shape information.

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