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Scanning White Light Interferometry for Optical Scanner Calibration using GEM-foil based Traceable Standard

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Abstract

Gas Electron Multiplier (GEM) detectors record particle trajectories in colliders. GEM characterization is important during manufacturing and final testing. We established a traceable method to calibrate our Optical Scanning System employed for quality control of GEM foils.

© 2014 Optical Society of America

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