Post-process tuning of slow light photonic crystal waveguides

Sebastian A. Schulz; Kashif M. Awan; Dennis X. Liu; Dennis X. Liu; Ksenia Dolgaleva; Jeremy Upham; Robert W. Boyd; Robert W. Boyd; Robert W. Boyd

doi:10.1364/FIO.2014.FW1B.5

Frontiers in Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper FW1B.5
•https://doi.org/10.1364/FIO.2014.FW1B.5

Post-process tuning of slow light photonic crystal waveguides

Sebastian A. Schulz, Kashif M. Awan, Dennis X. Liu, Ksenia Dolgaleva, Jeremy Upham, and Robert W. Boyd

Frontiers in Optics 2014

Tucson, Arizona United States
19–23 October 2014
ISBN: 1-55752-286-3

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Photonic Crystal Cavities and Waveguides (FW1B)

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S. A. Schulz, K. M. Awan, D. X. Liu, K. Dolgaleva, J. Upham, and R. W. Boyd, "Post-process tuning of slow light photonic crystal waveguides," in Frontiers in Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper FW1B.5.

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Abstract

We present a wet chemical method for tuning the slow light operating wavelength of silicon photonic crystal waveguides. This procedure compensates for the effects of slab thickness -and systematic hole radii - variations.

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