Abstract

We experimentally demonstrate ultra-high quality factors (Q = 1.96 × 106) in genetically designed 2D L3 photonic crystal nanocavities fabricated in Si slabs. Together with ultra-small effective mode volumes ~ 0.96(λ/n)3, such a nanocavity offers a new platform in future integrated nanophotonics.

© 2014 Optical Society of America

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