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Nonlinear Excitation Associated with Direct Laser Writing in SU-8

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Abstract

Multi-photon direct laser writing (mpDLW) experiments, Z-scan spectroscopy, and quantum chemical calculations indicate that the initiators used in the photo-polymerizable resin SU-8 are capable of three-photon excitation at or near the vacuum wavelength of 800 nm and that this excitation mode affects its performance when the material is used to micro-fabricate three-dimensional structures by mpDLW. These findings can be leveraged to improve its use for fabricating three-dimensional micro-structures.

© 2014 Optical Society of America

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