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Conferences > FiO > 2012 > FTu1A > FTu1A.6

Photoluminescence Properties of Nanostructured Silicon Fabricated by Metal-assisted Chemical Etching

V.A. Smyntyna, I.R. Iatsunskyi, O.V. Sviridova, and N.N. Pavlenko

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Abstract

The photoluminescence of nanostructured silicon obtained by metal-assisted chemical etching (MaCE) is investigated. It is shown that the intensity and the peak of photoluminescence depend on the silicon morphology caused by MaCE conditions.

© 2012 Optical Society of America

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