A compact, vibration insensitive interferometer design that is well suited for measuring optics while mounted in situ on polishing equipment is presented. The system employs a single-frame-phase sensor that permits acquisition in tens of microseconds to mitigate the effects of vibration or relative-motion with the test-part. The theory of operation is presented along with experimental test results, which characterize repeatability and precision under static and high-vibration conditions.

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