Fabrication and Characterization of On-chip Chalcogenide Nano-waveguide Devices

Qiming Zhang; Xiang Wu; Ming Li; Liying Liu; Lei Xu

doi:10.1364/FIO.2010.FThC4

Frontiers in Optics 2010/Laser Science XXVI
OSA Technical Digest (CD) (Optica Publishing Group, 2010),
paper FThC4
•https://doi.org/10.1364/FIO.2010.FThC4

Fabrication and Characterization of On-chip Chalcogenide Nano-waveguide Devices

Qiming Zhang, Xiang Wu, Ming Li, Liying Liu, and Lei Xu

Frontiers in Optics 2010

Rochester, New York United States
24–28 October 2010
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Integrated Optics (FThC)

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Q. Zhang, X. Wu, M. Li, L. Liu, and L. Xu, "Fabrication and Characterization of On-chip Chalcogenide Nano-waveguide Devices," in Frontiers in Optics 2010/Laser Science XXVI, OSA Technical Digest (CD) (Optica Publishing Group, 2010), paper FThC4.

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Abstract

Buried As₂S₃ nano-waveguides with size down to 200 nm on silicon wafer are prepared. The fabricated waveguide and micro-ring cavity show excellent optical properties. Optical nonlinearity of the nano-waveguides is characterized as well.

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