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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper JWC53
  • https://doi.org/10.1364/FIO.2009.JWC53

Design and Fabrication of Multilayer Si/SiO2 Super-High N.A. GRIN Lens for Nanowaveguide to Optical Fiber Coupling

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Abstract

Compact multilayer Si/SiO2 asymmetric GRIN lens (length:10~20μm) for vertical optical mode-size transformation from sub-0.5μm of nanowaveguide to ~10μm of single-mode-fiber, is proposed and designed. We report success in deposition and etching of 6~8μm multilayer Si/SiO2.

© 2009 Optical Society of America

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