Abstract

Compact multilayer Si/SiO<sup>2</sup>asymmetric GRIN lens (length:10~20?m) for vertical optical mode-size transformation from sub-0.5?m of nanowaveguide to ~10?m of single-mode-fiber, is proposed and designed. We report success in deposition and etching of 6~8?m multilayer Si/SiO<sup>2</sup>.

© 2009 OSA

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