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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FWG5
  • https://doi.org/10.1364/FIO.2009.FWG5

Uniformity of Concentration Factor and BFL in Microlens Array for Image Detectors Applications

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Abstract

We use an array of polymer microlenses spatially matched to an array of SPADs (Single Photon Avalanche Detector) to mitigate the loss of sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. We report results about reproducibility of concentration factor and back focal length within an individual 32×32 array. At a C factor of 35 and a focal length F=40 µm, the spread of concentration is < 6%, and the spread of BFL is <0.5 µm.

© 2009 Optical Society of America

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