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Conferences > FiO > 2006 > FTuP > FTuP3

Optically Addressed MEMS Deformable Mirrors Driven via an Array of Photodetectors‡

Bahareh Haji-saeed, Sandip K. Sengupta, Craig Armiento, William D. Goodhue, Jed Khoury, Kenneth Vaccaro, Charles L. Woods, John Kierstead, Andrew Davis, and William Clark

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Abstract

This paper presents fabrication of all-optically-addressed-deformable-mirror-MEMS driven via an array of photodetectors. Each deformable mirror is suspended over a PIN photodetector structure. It was possible to drive the MEMS optically and this was demonstrated experimentally.

© 2006 Optical Society of America

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