Low-Loss Thin SOI Waveguides and High-Q Ring Resonators

M. A. Webster; R. M. Pafchek; G. Sukumaran; T. L. Koch

doi:10.1364/FIO.2005.FTuV3

Frontiers in Optics
OSA Technical Digest Series (Optica Publishing Group, 2005),
paper FTuV3
•https://doi.org/10.1364/FIO.2005.FTuV3

Low-Loss Thin SOI Waveguides and High-Q Ring Resonators

M. A. Webster, R. M. Pafchek, G. Sukumaran, and T. L. Koch

Frontiers in Optics 2005

Tucson, Arizona United States
16–21 October 2005
ISBN: 1-55752-797-0

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Silicon Photonics II (FTuV)

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M. A. Webster, R. M. Pafchek, G. Sukumaran, and T. L. Koch, "Low-Loss Thin SOI Waveguides and High-Q Ring Resonators," in Frontiers in Optics, OSA Technical Digest Series (Optica Publishing Group, 2005), paper FTuV3.

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Abstract

We report quasi-planar ridge waveguides with losses of < 0.7 dB/cm in thin silicon-on-insulator material including waveguide-based ring resonators with quality factors of Q ~ 10⁶.

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