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Conferences > FiO > 2005 > FThQ > FThQ6

Linear and Chirped gratings on thin-film waveguides with Focused Ion-Beam milling

Kalyani Chaganti, Ildar Salakhutdinov, Ivan Avrutsky, John Mansfield, and Gregory W. Auner

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Abstract

Linear and chirped gratings with feature sizes 150-300 nm have been fabricated in hafnium oxide waveguides with focused ion beam milling. Focusing waveguide grating is a key element in a compact integrated optic micro-spectrometer.

© 2005 Optical Society of America

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