Super-resolution optical profilometry using maximum likelihood estimation

Wenyang Sun; George Barbastathis; Mark A. Neifeld

doi:10.1364/FIO.2005.FThM4

Frontiers in Optics
OSA Technical Digest Series (Optica Publishing Group, 2005),
paper FThM4
•https://doi.org/10.1364/FIO.2005.FThM4

Super-resolution optical profilometry using maximum likelihood estimation

Wenyang Sun, George Barbastathis, and Mark A. Neifeld

Frontiers in Optics 2005

Tucson, Arizona United States
16–21 October 2005
ISBN: 1-55752-797-0

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W. Sun, G. Barbastathis, and M. A. Neifeld, "Super-resolution optical profilometry using maximum likelihood estimation," in Frontiers in Optics, OSA Technical Digest Series (Optica Publishing Group, 2005), paper FThM4.

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Abstract

We present a volume holographic imaging profilometry technique with multiplexing holograms and maximum likelihood estimation based post-processing. It can resolve eight object slices with four times super-resolution with one exposure.

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