We study the interaction of tightly focused polarization vortex beams at edges and other surface features. By modeling reticle edges and surface roughness as long-period gratings, the formalism of rigorous coupled wave theory may be applied to surface scattering and scanning microscopy. We compare theory and experiment for scanning microscopy of surface structures using azumuthally and radially polarized beams.

© 2005 Optical Society of America

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