We studied and investigated the problem of diffraction by finite grating using a rigorous hybrid FEM-based method. The method is based on analyzing only one grating cell and then combining the results with the geometry arrangements of the whole structure to determine the diffracted fields. The method is very fast, rigorous and robust and can be applied to general incident field on any general grating profile: dielectric or metallic.

© 2004 Optical Society of America

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