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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest Series (Optica Publishing Group, 2004),
  • paper FThI3
  • https://doi.org/10.1364/FIO.2004.FThI3

Toward Two-Dimensional Arrays of Optically-Controlled Optical- Phase Modulators with Cantilever-Springed Mirror MEMS Plates

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Abstract

In this paper, we present the fabrication, operating theory and simulation of an all optically addressed cantilevered array, spatial light modulator. Our electrically driven device can be analyzed as two separate impedances, one between the cantilever-springed mirror and substrate, the other between the substrate and back electrode.

© 2004 Optical Society of America

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