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  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest Series (Optica Publishing Group, 2004),
  • paper FMQ4
  • https://doi.org/10.1364/FIO.2004.FMQ4

Experimental demonstration of the superprim effect in the SOI photonic technology

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Abstract

A Silicon On Insulator (SOI) photonic crystal superpris m has been designed using the plane -wave method and equi -frequency contours. Samples have been fabricated by 193 nm DU V lithography and RIE etching process. Optica l measurements performed around 1.33 µm show an optical dispersion of about 0.3 °/nm.

© 2004 Optical Society of America

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