Abstract

A Silicon On Insulator (SOI) photonic crystal superprism has been designed using the plane-wave method and equi-frequency contours. Samples have been fabricated by 193 nm DUV lithography and RIE etching process. Optical measurements performed around 1.33 µm show an optical dispersion of about 0.3°/nm.

© 2004 Optical Society of America

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