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Microscopic Imaging of Defect Density Distribution in GaAs Using the Decay Time of Photo-Excited Carriers

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Abstract

Through pump-probe experiment using femtosecond laser pulses, we demonstrated that the defect density distribution in a GaAs surface can two-dimensionally be imaged by mapping the decay time of carriers excited by the ultrafast laser pulse. The spatial resolution is determined by the spot size of the probe beam.

© 2003 Optical Society of America

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