A Miniature Fourier Transform Spectrometer by a Large-Vertical-Displacement Microelectromechanical Mirror

Lei Wu; Andrea Pais; Sean R. Samuelson; Shuguang Guo; Huikai Xie

doi:10.1364/FTS.2009.FWD4

Advances in Imaging
OSA Technical Digest (CD) (Optica Publishing Group, 2009),
paper FWD4
•https://doi.org/10.1364/FTS.2009.FWD4

A Miniature Fourier Transform Spectrometer by a Large-Vertical-Displacement Microelectromechanical Mirror

Lei Wu, Andrea Pais, Sean R. Samuelson, Shuguang Guo, and Huikai Xie

Fourier Transform Spectroscopy 2009

Vancouver Canada
26–30 April 2009
ISBN: 978-1-55752-871-1

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Laboratory and Miniature FTS (FWD)

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L. Wu, A. Pais, S. R. Samuelson, S. Guo, and H. Xie, "A Miniature Fourier Transform Spectrometer by a Large-Vertical-Displacement Microelectromechanical Mirror," in Advances in Imaging, OSA Technical Digest (CD) (Optica Publishing Group, 2009), paper FWD4.

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Abstract

A microelectromechanichal system (MEMS) mirror based miniature Fourier transform spectrometer is reported. A spectral resolution of 19.2 cm⁻¹ has been achieved with a 261 µm physical scan range generated by the large-vertical-displacement MEMS mirror.

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