Aspheres in microlithography

David Williamson; Robert Kestner; Jay Daniel; Daniel Bajuk

doi:10.1364/FTA.1999.DS2

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Fabrication and Testing of Aspheres 1999

Washington D. C. United States
1 January 1999
ISBN: 1-55752-557-9

From the session
Design and Specifications (DS)

Aspheres in microlithography

David Williamson, Robert Kestner, Jay Daniel, and Daniel Bajuk

D Williamson
R Kestner
J Daniel
D Bajuk

Fabrication and Testing of Aspheres
OSA Trends in Optics and Photonics (Optical Society of America, 1999),
paper DS2
•https://doi.org/10.1364/FTA.1999.DS2

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D. Williamson, R. Kestner, J. Daniel, and D. Bajuk, "Aspheres in microlithography," in Fabrication and Testing of Aspheres, J. Taylor, M. Piscotty, and A. Lindquist, eds., Vol. 24 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper DS2.

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Related Topics
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
- Microlithography
Previously assigned OCIS codes
- Microlithography (110.3960)
- Lithography (220.3740)

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Fabrication and Testing of Aspheres 1999
Washington D. C. United States
1 January 1999
ISBN: 1-55752-557-9
From the session Design and Specifications (DS)

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Fabrication and Testing of Aspheres 1999

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