Aspheres in microlithography

David Williamson; Robert Kestner; Jay Daniel; Daniel Bajuk

doi:10.1364/FTA.1999.DS2

Search Options

Keywords

Only if other resources available (images, video, datasets)

Title and Abstract

All text

Authors

• Use these formats for best results: Smith or J Smith
• Use a comma to separate multiple people: J Smith, RL Jones, Macarthur

Any : All :

Tips for preparing a search:

Keep it simple - don't use too many different parameters.
Separate search groups with parentheses and Booleans. Note the Boolean sign must be in upper-case.
- Example: (diode OR solid-state) AND laser [search contains "diode" or "solid-state" and laser]
- Example: (photons AND downconversion) - pump [search contains both "photons" and "downconversion" but not "pump"]
Improve efficiency in your search by using wildcards.

Asterisk ( * ) -- Example: "elect*" retrieves documents containing "electron," "electronic," and "electricity"
Question mark (?) -- Example: "gr?y" retrieves documents containing "grey" or "gray"

Use quotation marks " " around specific phrases where you want the entire phrase only.
For best results, use the separate Authors field to search for author names.
Author name searching:
- Use these formats for best results: Smith or J Smith
- Use a comma to separate multiple people: J Smith, RL Jones, Macarthur
- Note: Author names will be searched in the keywords field, also, but that may find papers where the person is mentioned, rather than papers they authored.

Search in:

Journals

Vol.

Issue

Page

Proceedings

Year

Paper #

Publication years

From To

Enter only one date to search

After ("From") or Before ("To")

Optics & Photonics Topics

Browse All Topics

Selected topics

Find articles with any selected topics Find articles with all selected topics

Browse All Topics
Click the to reveal subtopics. Use the checkbox to select a topic to filter your search.

About Optics & Photonics Topics
OSA Publishing developed the Optics and Photonics Topics to help organize its diverse content more accurately by topic area. This topic browser contains over 2400 terms and is organized in a three-level hierarchy. Read more.

Topics can be refined further in the search results. The Topic facet will reveal the high-level topics associated with the articles returned in the search results.

Special Collections

Energy Express
Engineering and Laboratory Notes

Spotlight on Optics
Tutorials

Clear my choices above

Journals Journals
Proceedings
- Find Proceedings
- By Year
- By Conference
- Featured
- Optical Fiber Communication (OFC)
- Conference on Lasers and Electro-Optics (CLEO)
- Frontiers in Optics (FiO)
Other Resources
- Publications
- Lasers eBook
- OSA Century of Optics
- OPN Centennial eBooklets
- OIDA Reports
- Products and Services
- Digital Archive
- Interactive Science Publishing (ISP)
- Optics ImageBank
- Spotlight on Optics
- Information For
- Authors
- Reviewers
- Librarians
- Regional Sites
- OSA Publishing China
- Open Access Information
- Open Access Statement and Policy
- Terms for Journal Article Reuse

My Favorites
- Go to My Account
- Login to access favorites
Recent Pages

Fabrication and Testing of Aspheres 1999

Washington, D.C. United States
1 January 1999
ISBN: 1-55752-557-9

From the session
Design and Specifications (DS)

Aspheres in microlithography

David Williamson, Robert Kestner, Jay Daniel, and Daniel Bajuk

D Williamson
R Kestner
J Daniel
D Bajuk

Fabrication and Testing of Aspheres
OSA Trends in Optics and Photonics (Optical Society of America, 1999),
paper DS2
•https://doi.org/10.1364/FTA.1999.DS2

Get Citation
Copy Citation Text
D. Williamson, R. Kestner, J. Daniel, and D. Bajuk, "Aspheres in microlithography," in Fabrication and Testing of Aspheres, J. Taylor, M. Piscotty, and A. Lindquist, eds., Vol. 24 of OSA Trends in Optics and Photonics (Optical Society of America, 1999), paper DS2.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get PDF (1070 KB)
Set citation alerts
Save article

Related Topics
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
- Microlithography
Previously assigned OCIS codes
- Microlithography (110.3960)
- Lithography (220.3740)

Not Accessible

Your account may give you access

Abstract

Abstract

No abstract available.

PDF Article

Fabrication and Testing of Aspheres 1999
Washington, D.C. United States
1 January 1999
ISBN: 1-55752-557-9
From the session Design and Specifications (DS)

Privacy | Terms of Use

Abstract

Fabrication and Testing of Aspheres 1999

Login or Create Account