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Commissioning and Initial Experiments of an EUV Capillary Discharge Laser

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Abstract

The commissioning and initial experiments with an extreme ultra-violet (EUV) capillary discharge laser (46.9nm) are presented. We investigate the reflectivity and focusability of gold mirrors at 46.9nm and the ability of the EUV laser to ablate solid targets.

© 2018 The Author(s)

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