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Conferences > EUVXRAY > 2016 > ET5A > ET5A.2

The First Commercial Table-Top Coherent EUV Sources for Metrology and Imaging Applications

Xiaoshi Zhang, Sterling J. Backus, Christopher Wood, and Henry Kapteyn

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Abstract

In this paper, we present our latest results on development of a high harmonic generation (HHG) based EUV source at KMLabs. We have successfully demonstrated the first commercially available HHG source that meets critical specifications for metrology and imaging applications. We attribute this performance to our patented hollow core fiber technology and the modularized beamline developed to reliably characterize this EUV source.

© 2016 Optical Society of America

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