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Conferences > EUVXRAY > 2016 > ES2A > ES2A.1

Development of Accelerator-Based Compact EUV and X-ray Sources in Japan

Tetsuya Ishikawa

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Abstract

Some recent developments in Japan for compact light sources based on accelerator technology are reviewed. An innovative combination of accelerator and laser technologies will open up exciting new opportunities for light source development.

© 2016 Optical Society of America

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