Abstract

The field of femtosecond beam shaping is undergoing rapid expansion for numerous applications since intense-light-matter interactions are used in both fundamental and applied science. Laser processing of transparent materials is currently an important technological topic, because transparent materials have an increasing number of applications in consumer electronics, microelectronics, photonic chips or next-generation displays. Single-shot machining by structured beams is attractive for such applications, but only void nanochannel fabrication has so far been demonstrated from Bessel beams [1]. The challenge in laser structuring of dielectrics is that the high intensities required (>10¹³W/cm²) are associated with strong spatio-temporal nonlinear distorsions of the laser pulses.

© 2015 IEEE