High stress Si3N4 membranes give rise to many optomechanical experiments [1–4]. A great interest around them is created by their extraordinary mechanical properties, low optical absorption and low mass. However Si3N4 membranes possess small refractive index when optomechanical (OM) coupling strongly depends on resonator’s reflectivity for such OM system as membrane-in-the-middle of Fabry-Perot (FP) cavity Fig. 1a.

© 2015 IEEE

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