Abstract
A novel technique is presented for integrating diffractive optical elements onto silicon. The processing is made in a reverse order as the diffractive lens is first embossed in a plastic layer on the silicon wafer.
© 2004 Optical Society of America
PDF ArticleMore Like This
Jeffrey A. Davis and Ignacio Moreno
DMC9 Diffractive Optics and Micro-Optics (DOMO) 2004
Richard Ferriere, John M. Dudley, and Badr-Eddine Benkelfat
CWA37 Conference on Lasers and Electro-Optics (CLEO:S&I) 2004
Edson J. Carvalho, Edmundo S. Braga, and Lucila Cescato
DMC4 Diffractive Optics and Micro-Optics (DOMO) 2004