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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (Optica Publishing Group, 2004),
  • paper DWA5
  • https://doi.org/10.1364/DOMO.2004.DWA5

A novel technique for integration of optical elements onto Silicon

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Abstract

A novel technique is presented for integrating diffractive optical elements onto silicon. The processing is made in a reverse order as the diffractive lens is first embossed in a plastic layer on the silicon wafer.

© 2004 Optical Society of America

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