A subwavelength size computer generated hologram(SSCGH) is designed with rigorous coupled-wave analysis(RCWA), the simulation results of the SSCGH are given with different polarization incident beams, the intensity ratio of the different polarization reconstructed images is more than 60 . The fabrication error is also discussed, the filling factor and etched depth can vary from 26%-32% and 0.64um-0.72um respectively.

© 2002 Optical Society of America

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