Abstract

We present a miniaturized Fourier transform spectrometer based on optical micro-electro-mechanical system (OMEMS) technology. The spectrometer is a Michelson interferometer with one scanning mirror. An electrostatic comb drive actuator moves the mirror. The measured resolution of the spectrometer is 6 nm at a wavelength of 633 nm. In addition, we propose a method to integrate micro-optical components, like cylindrical lenses and beamsplitters, into the silicon chip with the actuated mirror.

© 2002 Optical Society of America