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Conferences > DOMO > 2002 > DTuC > DTuC4

Fabrication and Assembly of Miniature Imaging Systems Using Lithographically Patterned Micro-optics and Silicon Microstructures

Jeremy D. Rogers, Michael R. Descour, Ari H.O. Kärkkäinen, Randy J. Shul, C.G. Willison, and C.P. Tigges

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Abstract

A miniature imaging system is constructed by precision assembly of lithographically patterned hybrid-glass micro-optics on a micro-machined silicon substrate or Micro Optical Table (MOT).

© 2002 Optical Society of America

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