Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > DOMO > 2002 > DTuC > DTuC3

Optical microelectromechanical systems (OMEMS) based on silicon-on-insulator (SOI) technology

Wilfried Noell, Pierre-André Clerc, Benedikt Guldimann, Gregor Schürmann, Urs Staufer, Nico de Rooij, Hans Peter Herzig, Omar Manzardo, René Dändliker, and Cornel Marxer

Not Accessible

Your library or personal account may give you access

Abstract

Microelectromechanical systems (MEMS) combined with optical components add optical functionality to the devices and lead to the terms OMEMS and MOEMS. The underlying technology of the presented devices is the silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting devices for commercial applications. Another different microfabrication process yields optical near-field sensors with an optical resolution of 32 nm.

© 2002 Optical Society of America

PDF Article
More Like This
Optical MEMS based on moving micro-mechanical waveguides: technologies and component developments

Eric Ollier
IFB3 Integrated Photonics Research (IPR) 2002

Micro-sized Fourier spectrometer

Omar Manzardo, Yves Petremand, Hans Peter Herzig, Wilfried Noell, and Nico De Rooij
DTuC5 Diffractive Optics and Micro-Optics (DOMO) 2002

Optical couplers in silicon-on-insulator technology

P. D. Trinh, S. Yegnanarayanan, and B. Jalali
CWD5 Conference on Lasers and Electro-Optics (CLEO:S&I) 1996

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use