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Numerical modeling of coated gratings in sensitive cases

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Abstract

Grating designs of practical interest, with subtle features of efficiency curves sensitive to the data or requiring very accurate computations, are considered. Examples (conformal and non-conformal coated gratings, in both polarizations) include: grating with a very thin oxide layer; non-conformal grating having a very narrow resonance peak, sensitive to refractive index measurements and interpolation; non-conformal sinusoidal grating with coating in the form of semi-cylinders with turn points; echelle with a tapered coating. The results are obtained by two integral method codes of the PCGrateTM software. Implementation details and validation of results are discussed.

© 2002 Optical Society of America

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