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Conferences > DOMO > 2000 > DWA > DWA5

Design and Fabrication of System Components for Passive Assembly of Heterogeneous, 3D Micro-Optical Systems

Raviv Levy, Michael R. Descour, Sauna Juuso, Terho Kololuoma, and Julia T. Rantala

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Abstract

We are developing a new fabrication approach for 3D heterogeneous micro-optical systems compatible with mass-production and passive-alignment integration. We report on preliminary design and testing of lithographically defined system components and alignment-metrology methods.

© 2000 Optical Society of America

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