Wafer-scale replication of glass micro-optics for optical communications

Thomas J. Suleski; Betty Baggett; Harris Miller; Bill Delaney; Jennifer Pagan

doi:10.1364/DOMO.2000.DWA2

Diffractive Optics and Micro-Optics
OSA Trends in Optics and Photonics (Optica Publishing Group, 2000),
paper DWA2
•https://doi.org/10.1364/DOMO.2000.DWA2

Wafer-scale replication of glass micro-optics for optical communications

Thomas J. Suleski, Betty Baggett, Harris Miller, Bill Delaney, and Jennifer Pagan

Diffractive Optics and Micro-Optics 2000

Québec City Canada
18–22 June 2000
ISBN: 1-55752-635-4

From the session
Micro Optics (DWA)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
T. J. Suleski, B. Baggett, H. Miller, B. Delaney, and J. Pagan, "Wafer-scale replication of glass micro-optics for optical communications," in Diffractive Optics and Micro-Optics , T. Li, ed., Vol. 41 of OSA Trends in Optics and Photonics (Optica Publishing Group, 2000), paper DWA2.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

Binary, multi-level, and continuous relief micro-optics have been replicated at the wafer level in multiple materials. The fabrication process is discussed, and experimental results are presented.

PDF Article

More Like This

Wafer-scale replication of optical components on VCSEL wafers

Chr. Gimkiewicz, Chr. Zschokke, S. Obi, C. Urban, J. S. Pedersen, M. T. Gale, and M. Moser
MF52 Optical Fiber Communication Conference (OFC) 2004

Micro-optical modules fabricated by high-precision replication processes

Markus Rossi and Ilkka Kallioniemi
DTuC1 Diffractive Optics and Micro-Optics (DOMO) 2002

Integrated micro-optical systems fabricated by replication technology

M.T. Gale, M. Rossi, L. Stauffer, M. Scheidt, and J.R. Rogers
DWA.2 Diffractive Optics and Micro-Optics (DOMO) 1998

Previous Article Next Article