We report on a Maxwell-solver modal technique for multi-layered grating structures which is convergent and unconditionally stable with respect to increasing the truncation order, depths and number of grating layers. To provide the convergence, the Rayleigh-Fourier series implementation has been recast as compared to the rigorous coupled-wave analysis. The solution is propagated through the layers using a scattering-matrix ansatz that ensures the stability. Different applications of the developed technique are outlined.

© 2000 Optical Society of America

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