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Fabrication of Diffractive Optical Elements for an Opto-electronic Hybrid Information System

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Abstract

We fabricated diffractive optical elements for an opto-electronic hybrid information system called TOMBO (Thin Observation Module by Bound Optics). The TOMBO is a functional image detector composed of a compound imaging optics, a photo detector array, and postprocessing circuits. This paper describes a fabrication of a multiple phase level diffractive microlens array by electron beam lithography.

© 2000 Optical Society of America

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