In the present research we discuss the results of analysis of coherent light beams carrying optical vortex and reflecting from the surface with a complex microrelief. It was shown, that phase analysis of singular beam with single charged centered optical vortex allow to calculate data about sample roughness and retrieve the surface relief with high resolution exceeding optical diffraction limit. Vertical resolution of vortex roughness probing can be achieved down to 5,27 nm for He-Ne laser source.

© 2018 The Author(s)

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