Single-shot normal incidence imaging ellipsometer based on polarized dual-reference wave scheme

Daesuk Kim; Hyunsuk Kim; Dahi Abdelsalam; Dugargaramjav Tserendolgor; Byunjoon Baek

doi:10.1364/DH.2011.DTuC24

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Digital Holography and Three-Dimensional Imaging 2011

Tokyo Japan
9–11 May 2011
ISBN: 978-1-55752-912-1

From the session
Poster Session I (DTuC)

Single-shot normal incidence imaging ellipsometer based on polarized dual-reference wave scheme

Daesuk Kim, Hyunsuk Kim, Dahi Abdelsalam, Dugargaramjav Tserendolgor, and Byunjoon Baek

Digital Holography and Three-Dimensional Imaging
OSA Techinal Digest (CD) (Optical Society of America, 2011),
paper DTuC24
•https://doi.org/10.1364/DH.2011.DTuC24

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D. Kim, H. Kim, D. Abdelsalam, D. Tserendolgor, and B. Baek, "Single-shot normal incidence imaging ellipsometer based on polarized dual-reference wave scheme," in Digital Holography and Three-Dimensional Imaging, OSA Techinal Digest (CD) (Optical Society of America, 2011), paper DTuC24.

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Abstract

The proposed scheme can provide a very fast solution for featuring the nano pattern 3D objects.

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Abstract

Digital Holography and Three-Dimensional Imaging 2011

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