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Sub-wavelength 12.6nm Resolution Using a Tabletop High Harmonic Coherent Diffractive Microscope

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Abstract

We demonstrate the first general, sub-wavelength EUV diffraction imaging results using a 13.5nm high-harmonic light source. A novel modulus enforced probe technique is developed and implemented allowing quantitative imaging of nearly periodic objects.

© 2017 Optical Society of America

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