We demonstrate the utility of our CDI-based EUV microscope by quantitatively imaging objects in transmission and reflection. Feature depth is obtained in transmission and height is extracted in the first general, tabletop reflection CDI microscope.

© 2014 Optical Society of America

PDF Article
More Like This
High fidelity, general reflection-mode coherent diffractive imaging with a tabletop EUV source

Daniel E. Adams, Bosheng Zhang, Matthew D. Seaberg, Dennis F. Gardner, Elisabeth R. Shanblatt, Margaret M. Murnane, and Henry C. Kapteyn
STh3O.1 CLEO: Science and Innovations (CLEO_SI) 2014

Quantitative Chemically-Specific Coherent Diffractive Imaging of Reactions and Diffusion at Buried Interfaces using a Tabletop EUV Nanoscope

Elisabeth R. Shanblatt, Christina L. Porter, Dennis F. Gardner, Giulia F. Mancini, Robert M. Karl, Michael D. Tanksalvala, Charles S. Bevis, Victor H. Vartanian, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams
CT4C.1 Computational Optical Sensing and Imaging (COSI) 2016

High Numerical Aperture Reflection Mode Coherent Diffractive Imaging of Nano-Patterned Surfaces using a Tabletop Extreme Ultraviolet Source

Elisabeth R. Shanblatt, Bosheng Zhang, Dennis F. Gardner, Matthew D. Seaberg, Christina L. Porter, Robert M. Karl, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams
CW4E.4 Computational Optical Sensing and Imaging (COSI) 2015


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription