Abstract

We demonstrate a novel technique of contour-mode suppression of an integrated MEMS-photonic chip up to the first HBAR mode at 17 MHz. The flattened actuation response is critical to the development of compact LiDAR engine or low-noise frequency-agile laser.

© 2021 The Author(s)

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More Like This
Low-noise, Frequency-agile, Hybrid Integrated Lasers for LiDAR

Grigory Lihachev, Johann Riemensberger, Wenle Weng, Junqiu Liu, Hao Tian, Anat Siddharth, Rui Ning Wang, Viacheslav Snigirev, Sunil A. Bhave, and Tobias J. Kippenberg
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