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Conferences > CLEO_SI > 2021 > SM4B > SM4B.6

Selective area heteroepitaxy of antiphase boundary free GaAs microridges on on-axis (001) Si for silicon photonics

Bei Shi, Bowen Song, Aidan A. Taylor, Simone T. Suran Brunelli, and Jonathan Klamkin

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Abstract

Low defect density gallium arsenide microridges were selectively grown on patterned (001) silicon. Antiphase boundaries were eliminated by bending and self-annihilation, enabled by low temperature nucleation and subsequent growth temperature optimization.

© 2021 The Author(s)

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