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High Quality Factor Aluminum Nitride on Sapphire Resonators at Infrared and Near Infrared Wavelengths

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Abstract

We demonstrate low-loss aluminum nitride waveguides and ring resonators on sapphire. The ring resonators on this platform shows a high quality factor above 2.8 million at 1550 nm and above 120,000 at 780 nm.

© 2020 The Author(s)

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